Services & Solutions
Dry Pumps | Blowers | Wet Pumps | Turbos | Chillers | Exchange Service | Conversions

Products & Services
Customized On-Site Service Contracts

Refurbishment/Exchange Services for:
Dry/Wet Pumps:
BOC Edwards  
 
Ebara  
 
Alcatel  
 
Leybold  
Q Series to iQ Series Conversion  
Chillers  
Turbo Pumps  
Abatement  
Semiconductor Vacuum Pumps and Peripherals Service & Repair

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Trillium SubFab Services, Inc.
13011 SE Jennifer Street STE 204
Clackamas, OR 97015
Tel: 503-682-3837
Fax: 503-682-3803